Pulsed DUV laser at 193nm was generated as the seed for injecting-locked ArF excimer laser by use of sum-frequency generation between Yb- and Er-doped fiber laser systems.
We use the narrow-linewidth seeds and fiber amplifiers to obtain the fundamental wavelengths followed by several stages of nonlinear frequency conversion (SHG & SFG) to achieve the high coherence 193nm laser pulse.
193nm DUV laser
Pulsed DUV laser at 193nm was generated as the seed for injecting-locked ArF excimer laser by use of sum-frequency generation between Yb- and Er-doped fiber laser systems.
We use the narrow-linewidth seeds and fiber amplifiers to obtain the fundamental wavelengths followed by several stages of nonlinear frequency conversion (SHG & SFG) to achieve the high coherence 193nm laser pulse.
193nm DUV laser